MEMS Foundry
- Foundry Capabilities
  - Thin Film Deposition
  - Photolithography
    In MEMS and biomedical device fabrication, photolithography requirements may vary widely and that’s where we come in.
  - Photoresist Coating
    Whether your process demands a spray coat or spin coat on various substrates, our foundry checks all the boxes.
  - Wet Etch
  - Dry Etch
    Etching is the chemical removal of a thin film material during device processing. With field-proven experience, we provide etch variations to meet your requirements.
  - Metal Lift-Off
    Metal lift-off is an alternative process when etch is not a solution. We developed a specialized bilayer resist process that improves film adhesion and results in clean high-quality lift-off.
- ITAR Registered
MEMS Design
Wafer Services
- Thermal Oxidation
  We use thermal oxide as the primary passivation layer which allows us to build MEMS with the more temperature-friendly silicon.
- LPCVD Silicon Nitride
- PECVD Films
  Silicon nitride is a highly versatile film that we use to build MEMS devices or as a tool for defining active regions during field oxidation.
- PVD Metal and Dielectric Films
  Metal thin films are essential components in device-building. We offer the flexibility to ensure we meet your specific requirements.
- Undoped Polysilicon
  Our LPCVD polysilicon films enable control over crystallinity, uniformity, grain-size and film stress—making them versatile for MOS and MEMS applications
Buy Wafers
Working With Us
- Our Customers
- Markets
Resources
- Case Studies
- MEMS Process Guides
- Blog
  Get an inside look at the industry.
- Events
  Connect with us at industry events.
- News
  Read the latest about us.
About Us
- Team
  Our team is what makes Rogue Valley Microdevices so special. Learn more about our leadership team.
- Contact Us
  Questions? Get in touch with us. We’re excited to hear from you.
- Join Our Team
  Apply for our open positions and play a key role in the expansion of an advanced microelectronics company.
- Living in Southern Oregon
  Learn about the area and discover all that southern Oregon has to offer.
- Living on Florida’s Space Coast
Request a Quote

What can we quote?

Need wafers this week?Wafers we hold in stock ship from our online store without a quote.

MEMS Foundry → Request a Quote

Request a MEMS Foundry Quote

Tell us about your device and process requirements and a process engineer will send you a written quote.

Only your name, email, and consent are required. Anything you leave blank we will ask about before quoting.

MEMS Foundry Overview Foundry Capabilities Customer Case Studies