Advanced MEMS Fabrication & Process Development

At Rogue Valley Microdevices, we deliver high-performance MEMS fabrication backed by deep process expertise and rapid execution. Our U.S. – based MEMS foundry supports the full development cycle, from early-stage prototypes to scalable device fabrication, using the same production grade tools and processes.

Our team works directly with you to solve complex fabrication challenges, prepare your MEMS designs for manufacturability, and reduce development risk.

Whether you need a single prototype or a repeatable process flow, we provide the technical depth and responsiveness required to bring your MEMS device to life.

Why Choose Rogue Valley Microdevices

  • U.S.-based MEMS foundry
  • All wafer services performed in-house
  • Proven expertise in MEMS and sensor fabrication
  • Flexible engagement models (prototype through volume production)
  • Strong focus on manufacturability and speed

End-to-End MEMS Foundry Capabilities

We offer a comprehensive suite of MEMS fabrication services, all performed in-house for speed, control, and consistency:

  • Thin film deposition (LPCVD, PECVD, thermal oxidation, metals)
  • Photolithography (including spray coat for high-aspect-ratio features)
  • Dry etching (DRIE and plasma etch)
  • Wet etching (KOH, TMAH, and specialty chemistries)
  • Lift-off and patterning processes
  • Wafer bonding and substrate engineering (as applicable)

Our engineers design and execute process flows that align with your device requirements. We eliminate unnecessary handoffs and keep your project moving forward without delays.

Fabricating the Future

MEMS is a technology we can’t live without.

MEMS devices are dominating the market and enabling interactive electronic devices that are changing our lives for the better.

From the MEMS pressure sensors used in ADAS subsystems to the accelerometers in your smartphone, it’s clear that MEMS plays an outsize role in our future. As your foundry partner, we’re ready to step up to the plate.

How partnering with us reduces risk, simplifies development, and strengthens your supply chain

Our MEMS Engineering & Fabrication Approach

We operate as an extension of your engineering team and work alongside you from concept through volume manufacturing. Our MEMS experts engage early to identify technical risks, define process strategies, and align fabrication methods with your device requirements.

When you select Rogue Valley Microdevices as your manufacturing partner, you gain full visibility into how your devices are built. We believe transparency leads to better outcomes. You always understand the materials, processes, and decisions behind your MEMS fabrication with no hidden steps.

We take a collaborative and engineering driven approach to every project. Our team communicates openly, shares process insights, and provides fast feedback based on real wafer level results. This close partnership helps you move faster, reduce iteration cycles, and make confident design decisions.

We also support supply chain resilience by providing pre-processed ready-to-ship wafers. When your manufacturing plan requires multiple sources or specialized capabilities, we work with other foundries to ensure continuity and long term success. Our goal is to support your growth, not restrict it.

You gain:

  • Direct access to experienced MEMS fabrication engineers
  • Complete transparency into fabrication processes and decisions
  • Fast and data driven feedback from in-house wafer processing
  • Practical solutions grounded in real manufacturing experience
  • A collaborative partner focused on long term supply chain success

We do more than process wafers. We can help you design, build, and scale high performance MEMS devices.

From Prototype to Production

We bridge the gap between R&D and manufacturing. Our MEMS foundry supports low-to mid-volume production while preparing your process for scale.

We focus on:

  • Repeatability and process control
  • Yield optimization
  • Documentation and process transfer
  • Manufacturing readiness

By integrating development with fabrication from the start, we position your technology for a smoother transition into volume manufacturing.

Start Your MEMS Project Today

Partner with a MEMS foundry that prioritizes speed, transparency, and engineering collaboration. Contact Rogue Valley Microdevices to discuss your device, process, or fabrication needs.

ITAR Registered

Is your MEMS device targeting military, defense or aerospace applications? If so, you may need an International Traffic in ARMS Regulations (ITAR)-registered supply chain.

Created to protect national security and ensure foreign policy objectives, ITAR governs the export and re-export of controlled commodities, services and technologies. This includes microelectronic products such as MEMS devices.

Rogue Valley Microdevices is an ITAR-registered MEMS foundry. We can help you adhere to the stringent requirements that define your processes, security, and communications throughout your manufacturing process. That way, you’ll be ready to sell your ITAR-compliant MEMS devices to the U.S. Department of Defense.