MEMS Foundry
- Foundry Capabilities
  - Thin Film Deposition
  - Photolithography
    In MEMS and biomedical device fabrication, photolithography requirements may vary widely and that’s where we come in.
  - Photoresist Coating
    Whether your process demands a spray coat or spin coat on various substrates, our foundry checks all the boxes.
  - Wet Etch
  - Dry Etch
    Etching is the chemical removal of a thin film material during device processing. With field-proven experience, we provide etch variations to meet your requirements.
  - Metal Lift-Off
    Metal lift-off is an alternative process when etch is not a solution. We developed a specialized bilayer resist process that improves film adhesion and results in clean high-quality lift-off.
- ITAR Registered
MEMS Design
Wafer Services
- Thermal Oxidation
  We use thermal oxide as the primary passivation layer which allows us to build MEMS with the more temperature-friendly silicon.
- LPCVD Silicon Nitride
- PECVD Films
  Silicon nitride is a highly versatile film that we use to build MEMS devices or as a tool for defining active regions during field oxidation.
- PVD Metal and Dielectric Films
  Metal thin films are essential components in device-building. We offer the flexibility to ensure we meet your specific requirements.
- Undoped Polysilicon
  Our LPCVD polysilicon films enable control over crystallinity, uniformity, grain-size and film stress—making them versatile for MOS and MEMS applications
Shop Inventory
Working With Us
Markets
Resources
- Case Studies
- MEMS Process Guides
- Blog
  Get an inside look at the industry.
- Events
  Connect with us at industry events.
- News
  Read the latest about us.
About Us
- Team
  Our team is what makes Rogue Valley Microdevices so special. Learn more about our leadership team.
- Contact Us
  Questions? Get in touch with us. We’re excited to hear from you.
- Join Our Team
  Apply for our open positions and play a key role in the expansion of an advanced microelectronics company.
- Living in Southern Oregon
  Learn about the area and discover all that southern Oregon has to offer.
- Living on Florida’s Space Coast
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Rogue Valley Microdevices headquarters in Medford, Oregon

Contact · Medford, Oregon

Contact Rogue Valley Microdevices

Questions about a device, a process, or a wafer order? Talk directly to the people who will run your wafers. No black boxes, no long silences, just answers from our engineering and business-development teams.

Headquarters

Rogue Valley Microdevices
943 Automation Way, Suite F
Medford, OR 97504

Get directions

Sales & General

541-774-1900
sales@roguevalleymicro.com

Engineering and business-development teams answer directly.

Careers

careers@roguevalleymicro.com

Or browse our open positions.

More Ways to Connect

Events: meet us at industry conferences — see upcoming events.
Learn: browse our news and knowledge hub for process guides and case studies.
Wafers in stock: browse the ready-to-ship wafer inventory.

Ready for a Quote?

If you already have a device, process, or film stack in mind, the fastest path is our Request a Quote form: it routes your project straight to the right engineer.

Request a Quote