MEMS Foundry
- Foundry Capabilities
  - Thin Film Deposition
  - Photolithography
    In MEMS and biomedical device fabrication, photolithography requirements may vary widely and that’s where we come in.
  - Photoresist Coating
    Whether your process demands a spray coat or spin coat on various substrates, our foundry checks all the boxes.
  - Wet Etch
  - Dry Etch
    Etching is the chemical removal of a thin film material during device processing. With field-proven experience, we provide etch variations to meet your requirements.
  - Metal Lift-Off
    Metal lift-off is an alternative process when etch is not a solution. We developed a specialized bilayer resist process that improves film adhesion and results in clean high-quality lift-off.
- ITAR Registered
MEMS Design
Wafer Services
- Thermal Oxidation
  We use thermal oxide as the primary passivation layer which allows us to build MEMS with the more temperature-friendly silicon.
- LPCVD Silicon Nitride
- PECVD Films
  Silicon nitride is a highly versatile film that we use to build MEMS devices or as a tool for defining active regions during field oxidation.
- PVD Metal and Dielectric Films
  Metal thin films are essential components in device-building. We offer the flexibility to ensure we meet your specific requirements.
- Undoped Polysilicon
  Our LPCVD polysilicon films enable control over crystallinity, uniformity, grain-size and film stress—making them versatile for MOS and MEMS applications
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Markets
Resources
- Case Studies
- MEMS Process Guides
- Blog
  Get an inside look at the industry.
- Events
  Connect with us at industry events.
- News
  Read the latest about us.
About Us
- Team
  Our team is what makes Rogue Valley Microdevices so special. Learn more about our leadership team.
- Contact Us
  Questions? Get in touch with us. We’re excited to hear from you.
- Join Our Team
  Apply for our open positions and play a key role in the expansion of an advanced microelectronics company.
- Living in Southern Oregon
  Learn about the area and discover all that southern Oregon has to offer.
- Living on Florida’s Space Coast
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News · Guides · Case Studies · Events

Resources

An inside look at MEMS fabrication, from the engineers who do it. Process guides that compare your options, case studies that show the path from prototype to production, and news from our team and the industry.

MEMS Process Guides

Practical, engineering-level comparisons for choosing films, etches, and coating methods: thermal oxide vs PECVD oxide, DRIE vs wet etch, lift-off vs metal etch, and more.

Browse all guides →

Customer Case Studies

How real devices made the jump from concept to production on our line: eMagin, Biological Dynamics, and Nanomedical.

All case studies →

Blog

Perspectives from our team on MEMS, photonics, packaging, and the state of the semiconductor industry.

Read the blog →

News & Events

Company announcements and the conferences where you can meet us in person.

News → · Events →

Talk to a MEMS Foundry

Have a device in development or a process you want to outsource? Our engineering team reads every request and responds with a clear path forward.

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