U.S.-Based Wafer Services for MEMS and Semiconductor Manufacturing
Rogue Valley Microdevices provides precision wafer services for engineers who need individual film and process steps without committing to full device fabrication. Every wafer we process runs on the same production-grade equipment as our MEMS foundry, so the films you receive behave the same way in your process flow as they do in ours. And we never broker or outsource film processing: your wafers stay in our fab from receipt to shipment.
From a single lot of development wafers to recurring production volumes, our team delivers controlled, repeatable results with fast quotes and straightforward communication. You work directly with the engineers who run your wafers, and you always know how your material is being processed.
Need coated wafers now? Browse our ready-to-ship wafer inventory, or request a quote for custom processing.
Why Choose Rogue Valley Microdevices for Wafer Services
Silicon Wafer Processing Capabilities
We support MEMS development and semiconductor manufacturing workflows with a focused set of thermal and thin-film processes, each run with tight control over uniformity, repeatability, and material performance:
| Parameter | Capability |
|---|---|
| Wafer sizes | 50.8mm, 76.2mm, 100mm, 125mm, 150mm, and 200mm substrates |
| Substrates | Silicon, silicon-on-insulator (SOI), quartz, and sapphire; compatibility varies by process |
| Thermal oxidation | Dry, dry chlorinated, and wet thermal oxide from 500Å to 10µm |
| LPCVD silicon nitride | Stoichiometric, low-stress, and super-low-stress films up to 2µm |
| LPCVD polysilicon | Undoped films with control over crystallinity, grain size, uniformity, and film stress |
| PECVD and PVD films | Lower-temperature oxide and nitride deposition, including options for wafers with existing metal layers; metal deposition for interconnects and device functionality |
Explore each process in depth: thermal oxidation, LPCVD silicon nitride, undoped polysilicon, PECVD films, and PVD metal and dielectric films.
Production-Grade Films from a Working MEMS Fab
Unlike standalone film shops and wafer resellers, we grow and deposit films inside an active MEMS foundry. Every process is qualified against the same standards we hold for full device fabrication, because the same furnaces and deposition systems build working sensors and microdevices every day.
You gain:
- Wafer-level uniformity and repeatable material properties, lot after lot
- Films engineered for compatibility with your downstream lithography, etch, and release steps
- Direct access to process engineers who can tune film thickness and stress to your device requirements
- Full transparency into how your wafers are processed
Flexible Engagement, from One Step to Full Fabrication
Start with exactly what you need today and scale when you are ready.
Because wafer services live inside our foundry, moving from film purchases to device fabrication does not mean re-qualifying with a new vendor. Your processes, and the engineers who know them, come with you.
Strengthen Your Supply Chain
Many customers use our wafer services to build supply-chain resilience: pre-positioning coated substrates, qualifying a second U.S. source for critical films, or coordinating processing with other foundries. Our ready-to-ship inventory of bare and pre-processed wafers helps you bridge demand spikes without waiting on custom production.
Request a Quote for Wafer Services
Tell us about your substrate, film stack, and volumes, and our team will respond with a fast, straightforward quote. Request a quote to start your project, or shop ready-to-ship wafers to get material moving today.