Dielectric and Conductive Thin Films Wafer Services
With over fifty unique dielectric and conductive thin films, Rogue Valley Microdevices maintains the broadest and most comprehensive set of wafer services commercially available. All services including LPCVD nitride deposition are performed in our own class 100 cleanroom under the supervision of an experienced engineering team.
LPCVD Film Deposition
Thermal Processing
Conductive Film Deposition
PECVD Deposition
- Standard Oxide
- Slow Deposition Oxide
- OxyNitride with custom refractive index
- Standard Nitride
- Low Stress Nitride
Etch Services
- Wet Metal Etch
- Deep Reactive Etch (DRIE)
- Wet & Dry Silicon Etch
- Dry Oxide Etch
- Polyimide Etch
- Tantalum Nitride Etch
Spin and Spray Coat Services
- Spray Coat AZ Photoresist
- Spin Coat AZ Photoresist
- Polyimide Spin Coat