Precision MEMS Foundry
Technology commercialization and product development can be a long and arduous process. And if you’re competing in the fast-growing world of MEMS, the move from R&D to pilot production presents a number of challenges. Having a trusted partner that values open dialog and collaboration — and specializes in customized process development and device manufacturing — will get you over the hurdles and on the road to smoother production. We offer full Device Fabrication and Design services along with a variety of individual processes to support our growing network of satisfied customers. Our MEMS Foundry Capabilities include Metal Lift Off, Front to Back Alignment, Photoresist Spray Coat, Wet and Dry Etch, Low Stress LPCVD Nitride, LPCVD Undoped Polysilicon, PECVD Oxide, PECVD Carbon Doped Oxide, PECVD Nitride, Wet and Dry Thermal Oxidation, N2/H2 Annealing, and a variety of PVD Metal Films.