Over Fifty Unique Thin Film Options

for the MEMS and Microelectronics Industry


200mm MEMS Device Foundry

Supporting Our Customers from Early R&D to Pilot Production


Wafer Services

Single Step Processing for the Microelectronics Industry


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Silicon Wafers, Silicon Wafers with Oxide, Silicon Wafers with LPCVD Nitride

MEMS Foundry & Wafer Services

Technology commercialization and product development can be a long and arduous process. And if you’re competing in the fast-growing world of MEMS, the move from R&D to pilot production presents a number of challenges.

Having a trusted partner that values open dialog and collaboration — and specializes in customized process development and device manufacturing — will get you over the hurdles and on the road to smoother production.

We offer full Device Fabrication and Design services along with a variety of individual processes to support our growing network of satisfied customers.

Our MEMS Foundry Capabilities include:

  • Metal Lift Off
  • Front to Back Alignment
  • Photoresist Spray Coat
  • Wet and Dry Etch
  • Low Stress LPCVD Nitride
  • LPCVD Undoped Polysilicon
  • PECVD Oxide
  • PECVD Carbon Doped Oxide
  • PECVD Nitride
  • Wet and Dry Thermal Oxidation
  • N2/H2 Annealing
  • Variety of PVD Metal Films.

MEMS Device Fabrication

With over 50 years combined experience in MEMS fabrication and MEMS design our engineering team can quickly develop a turn key process for your most innovative MEMS product line. Rogue Valley Microdevices maintains a wide selection of thin films along with fully developed MEMS process modules that enable full device fabrication to be performed in-house. Having the capability to offer a more complete solution helps increase productivity, and enhances communication between our engineering team and yours. This unique approach helps to reduce cost, shorten process lead-time and increase your bottom line.
MEMS Device Fabrication.

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Wafer Services

We are big in wafer services. With a selection of over fifty dielectric and conductive thin films, Rogue Valley Microdevices maintains the broadest and most comprehensive set of wafer services commercially available. All services including LPCVD nitride deposition are performed in our own class 100 cleanroom under the supervision of an experience engineering team. Our wafer fabrication facility has the capacity to handle high-volume manufacturing but is flexible enough to accommodate your most sensitive processing needs.
Wafer Services.

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About Us

Rogue Valley Microdevices is dedicated to providing high quality manufacturing and engineering services of silicon wafers at an affordable price. We believe in our ability to meet or exceed our customers’ expectations of quality, price, and delivery. We supply services to customers with a wide variety of applications, including semiconductor, biotechnology, nanotechnology, and MEMS. About Rogue Valley Microdevices.

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Recent News

July 24, 2020 in Upcoming Events

Sensors Expo and Conference 2020

Sensors Expo and Conference June 22-24 2020, San Jose CA Meet Rogue Valley Microdevices at Booth 1225! Celebrating its 35th year, Sensors Expo & Conference has established itself as North…
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July 22, 2020 in Blog

Manufacturing Biosensors for COVID-19 Detection

COVID-19 has brought modern life to a standstill. With an approved vaccine still many months away, returning to some semblance of normalcy will depend on widespread testing to inform us…
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April 16, 2020 in In the News

MEMS Used for Developing COVID-19 Testing Devices

Rogue Valley Microdevices Working on Projects Related to Coronavirus Testing Rogue Valley Microdevices, which has been in the valley since 2004, specializes in biomedical device manufacturing and micro-electromechanical system or…
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