MEMS Foundry & Wafer Services
Technology commercialization and product development can be a long and arduous process. And if you’re competing in the fast-growing world of MEMS, the move from R&D to pilot production presents a number of challenges.
Having a trusted partner that values open dialog and collaboration — and specializes in customized process development and device manufacturing — will get you over the hurdles and on the road to smoother production.
We offer full Device Fabrication and Design services along with a variety of individual processes to support our growing network of satisfied customers.
Our MEMS Foundry Capabilities include:
- Metal Lift Off
- Front to Back Alignment
- Photoresist Spray Coat
- Wet and Dry Etch
- Low Stress LPCVD Nitride
- LPCVD Undoped Polysilicon
- PECVD Oxide
- PECVD Carbon Doped Oxide
- PECVD Nitride
- Wet and Dry Thermal Oxidation
- N2/H2 Annealing
- Variety of PVD Metal Films.
