Rogue Valley Microdevices' U.S.-based, ITAR-registered MEMS foundry

MEMS Foundry → ITAR Registered

ITAR-Registered MEMS Foundry for Aerospace and Defense

Secure U.S.-based manufacturing for export-controlled technologies

Rogue Valley Microdevices is an ITAR-registered MEMS foundry supporting defense, aerospace, and other export-controlled programs that require secure U.S.-based fabrication. From our fab in Medford, Oregon, with a second site in Palm Bay, Florida, we provide MEMS manufacturing and wafer processing for teams that need a trusted domestic partner rather than an offshore supply chain.

International Traffic in Arms Regulations (ITAR) govern how defense-related technologies and controlled technical data are handled, manufactured, and transferred. When your device or its technical data falls under ITAR, every partner in your supply chain matters. Our ITAR registration lets us support programs that require controlled handling of technical data, restricted access to sensitive designs, and U.S.-based wafer fabrication from start to finish.

Why ITAR Registration Matters in MEMS Manufacturing

Many advanced MEMS, sensor, and specialty semiconductor technologies support applications tied to national security, including navigation and guidance, defense communications, harsh-environment sensing, and mission-critical electronics. Programs like these typically require:

  • Controlled handling of export-controlled technical data
  • Restricted access to sensitive designs and process information
  • Domestic fabrication and secure supply chain infrastructure
  • A manufacturing partner registered with the U.S. Department of State

We align our fabrication workflows with these requirements while keeping engineering communication direct and transparent, so compliance never comes at the cost of momentum.

Why Choose Rogue Valley Microdevices

ITAR-Registered and U.S.-BasedOur Medford, Oregon and Palm Bay, Florida sites keep export-controlled work on U.S. soil
All Wafer Services In-HouseDeposition, photolithography, etch, and metallization all happen under our roof, simplifying control of technical data
Engineering-Driven CollaborationYou work directly with the engineers running your process, with transparency into every process decision
Prototype Through VolumeFlexible engagement carries your device from first wafers to production without changing partners
Supply-Chain ResilienceOur ready-to-ship wafer inventory shortens lead times and reduces offshore exposure

How Customers Engage Our ITAR-Registered MEMS Foundry

Whether you arrive with a mature process or a device concept, we meet your program where it is. Customers engage us for:

  • MEMS design services and design-informed manufacturing collaboration
  • MEMS process development and prototype fabrication
  • Wafer-level process integration
  • Foundry manufacturing from pilot lots to volume production
  • Scalable domestic production pathways for regulated programs

Secure Domestic Supply Chain Support

Domestic fabrication reduces offshore supply chain exposure and improves program continuity for organizations that prioritize secure sourcing. Our collaborative approach helps you identify manufacturing risks early, align process flows with device requirements, and establish a scalable pathway from prototype development through production manufacturing.

MEMS Fabrication Capabilities for Regulated Programs

Every core process runs inside our own facilities, keeping your wafers and technical data in-house from start to finish. Explore the full range of foundry capabilities or scan the summary below:

Process AreaCapabilitiesKey Specifications
Thin film depositionGrown and deposited films on customer or foundry wafersThermal oxidation, LPCVD, PECVD, and PVD metallization
PhotolithographyContact and proximity lithography with front-to-back alignmentFeatures 5µm and greater on 100mm, 150mm, and 200mm wafers
Photoresist coatingSpin coat and conformal spray coatPositive, lift-off, SU8, and polyimide resist systems
EtchIsotropic, anisotropic, and deep vertical etchingPlasma dry etch, DRIE for deep silicon, KOH and TMAH wet etch
Metal lift-offAdditive patterning for noble and hard-to-etch metalsBilayer resist process developed in-house for clean, high-quality edges

Deep links: thin film deposition, photolithography, photoresist coating, dry etch and DRIE, wet etch, and metal lift-off.

Need films on your own substrates? Our wafer services team deposits production-grade films on customer-supplied wafers.

Work with an ITAR-Registered MEMS Foundry

Tell us about your program and its compliance requirements, and our team will help you scope the process, the timeline, and a secure path to production. Request a quote or contact us to start the conversation.

Request a Quote