MEMS Foundry
- Foundry Capabilities
  - Thin Film Deposition
  - Photolithography
    In MEMS and biomedical device fabrication, photolithography requirements may vary widely and that’s where we come in.
  - Photoresist Coating
    Whether your process demands a spray coat or spin coat on various substrates, our foundry checks all the boxes.
  - Wet Etch
  - Dry Etch
    Etching is the chemical removal of a thin film material during device processing. With field-proven experience, we provide etch variations to meet your requirements.
  - Metal Lift-Off
    Metal lift-off is an alternative process when etch is not a solution. We developed a specialized bilayer resist process that improves film adhesion and results in clean high-quality lift-off.
- ITAR Registered
MEMS Design
Wafer Services
- Thermal Oxidation
  We use thermal oxide as the primary passivation layer which allows us to build MEMS with the more temperature-friendly silicon.
- LPCVD Silicon Nitride
- PECVD Films
  Silicon nitride is a highly versatile film that we use to build MEMS devices or as a tool for defining active regions during field oxidation.
- PVD Metal and Dielectric Films
  Metal thin films are essential components in device-building. We offer the flexibility to ensure we meet your specific requirements.
- Undoped Polysilicon
  Our LPCVD polysilicon films enable control over crystallinity, uniformity, grain-size and film stress—making them versatile for MOS and MEMS applications
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Markets
Resources
- Case Studies
- MEMS Process Guides
- Blog
  Get an inside look at the industry.
- Events
  Connect with us at industry events.
About Us
- Team
  Our team is what makes Rogue Valley Microdevices so special. Learn more about our leadership team.
- Contact Us
  Questions? Get in touch with us. We’re excited to hear from you.
- Join Our Team
  Apply for our open positions and play a key role in the expansion of an advanced microelectronics company.
- Living in Southern Oregon
  Learn about the area and discover all that southern Oregon has to offer.
- News
  Read the latest about us.
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Latest Articles

June 3, 2026June 9, 2026

Why the Future of Photonics Depends on Foundries, Packaging, and Scale

By Scott Rauscher, Chief Innovation Officer, Rogue Valley Microdevices Returning from the SPIE Defense + Security 2026 conference, I observed a few themes across the panels and the audience questions relevant to photonics applications in the defense industry and the […] Read More »

Blog Posts

April 16, 2026April 27, 2026

What MSEC 2026 Told Us About the Future of MEMS Foundries

By Scott Rauscher, Chief Innovation Officer, Rogue Valley MicrodevicesApril 16, 2026 The MEMS & Sensors Executive Congress (MSEC) 2026 brought together the industry’s leading voices, from Bosch and Infineon to edge-AI pioneers and the analysts tracking where billions in sensor […] Read More »

Blog Posts

April 1, 2026April 22, 2026

Rogue Valley Microdevices Launches MEMS Design Services; Names Industry Veteran Scott Rauscher as Chief Innovation Officer to Lead the Initiative

Foundry-Informed, flexible design capability enables customers to design with Rogue Valley Microdevices and fabricate at the foundry of their choice Palm Bay, FL – March 30, 2026 – Rogue Valley Microdevices (RVM), a U.S.-based pure-play MEMS foundry, today announced the […] Read More »

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