MEMS Foundry
- Design Process Development
  As your foundry partner, we’ll finely hone a development process to match your individual needs.
- Prototyping & Integration
  We work with university R&D labs, entrepreneurs and innovators who want to perfect their MEMS device.
- Collaboration
  We leverage the full MEMS ecosystem to maximize the strengths of your product or technology, and fill in any gaps.
- ITAR Registered
  Targeting your MEMS device to military/aero or defense applications? You may need an ITAR-compliant MEMS foundry in your supply chain.
Thin Films
- Silicon Nitride
  Silicon nitride is a highly versatile film that we use to build MEMS devices or as a tool for defining active regions during field oxidation.
- Metals
  Metal thin films are essential components in device-building. We offer the flexibility to ensure we meet your specific requirements.
- Silicon Oxide
  We use thermal oxide as the primary passivation layer which allows us to build MEMS with the more temperature-friendly silicon.
- Undoped Polysilicon
  Our LPCVD polysilicon films enable control over crystallinity, uniformity, grain-size and film stress—making them versatile for MOS and MEMS applications
Capabilities
- Photolithography
  In MEMS and biomedical device fabrication, photolithography requirements may vary widely and that’s where we come in.
- Resist Coating
  Whether your process demands a spray coat or spin coat on various substrates, our foundry checks all the boxes.
- Metal Lift-Off
  Metal lift-off is an alternative process when etch is not a solution. We developed a specialized bilayer resist process that improves film adhesion and results in clean high-quality lift-off.
- Etching
  Etching is the chemical removal of a thin film material during device processing. With field-proven experience, we provide etch variations to meet your requirements.
Markets
- Automotive
  Let us help you realize the reward by manufacturing your market-differentiating MEMS device for the lucrative automotive market
- Biomedical
  We partner with engineers and innovators to manufacture an array of life-enhancing health and biomedical sensors.
- Industrial
  The industrial sector is full of sensors from smart home tools to factory floors, and it’s just the beginning.
- Agricultural
  Attuned to the particular needs of agricultural sensing, we deliver the manufactured parts crucial for precision agriculture.
News & Knowledge
- Blog
  Get an inside look at the industry.
- News
  Read the latest about us.
- Events
  Connect with us at industry events.
About Us
- Team
  Our team is what makes Rogue Valley Microdevices so special. Learn more about our leadership team.
- Contact Us
  Questions? Get in touch with us. We’re excited to hear from you.
- Join Our Team
  Apply for our open positions and play a key role in the expansion of an advanced microelectronics company.
- Living in Southern Oregon
  Learn about the area and discover all that southern Oregon has to offer.
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Sillicon Wafer

Multi-Layer Stack

Wet Thermal Oxide - 2,000Å / Stoichiometric LPCVD Nitride - 2,000Å

100mm DSP

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Wet Thermal Oxide - 4,000Å / Sputter Ti-Cu 1,500Å/ Ti-Cu 1,500Å

200mm

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