MEMS Foundry
- Design Process Development
  As your foundry partner, we’ll finely hone a development process to match your individual needs.
- Prototyping & Integration
  We work with university R&D labs, entrepreneurs and innovators who want to perfect their MEMS device.
- Collaboration
  We leverage the full MEMS ecosystem to maximize the strengths of your product or technology, and fill in any gaps.
- ITAR Registered
  Targeting your MEMS device to military/aero or defense applications? You may need an ITAR-compliant MEMS foundry in your supply chain.
Thin Films
- Silicon Nitride
  Silicon nitride is a highly versatile film that we use to build MEMS devices or as a tool for defining active regions during field oxidation.
- Metals
  Metal thin films are essential components in device-building. We offer the flexibility to ensure we meet your specific requirements.
- Silicon Oxide
  We use thermal oxide as the primary passivation layer which allows us to build MEMS with the more temperature-friendly silicon.
- Undoped Polysilicon
  Our LPCVD polysilicon films enable control over crystallinity, uniformity, grain-size and film stress—making them versatile for MOS and MEMS applications
Capabilities
- Photolithography
  In MEMS and biomedical device fabrication, photolithography requirements may vary widely and that’s where we come in.
- Resist Coating
  Whether your process demands a spray coat or spin coat on various substrates, our foundry checks all the boxes.
- Metal Lift-Off
  Metal lift-off is an alternative process when etch is not a solution. We developed a specialized bilayer resist process that improves film adhesion and results in clean high-quality lift-off.
- Etching
  Etching is the chemical removal of a thin film material during device processing. With field-proven experience, we provide etch variations to meet your requirements.
Markets
- Automotive
  Let us help you realize the reward by manufacturing your market-differentiating MEMS device for the lucrative automotive market
- Biomedical
  We partner with engineers and innovators to manufacture an array of life-enhancing health and biomedical sensors.
- Industrial
  The industrial sector is full of sensors from smart home tools to factory floors, and it’s just the beginning.
- Agricultural
  Attuned to the particular needs of agricultural sensing, we deliver the manufactured parts crucial for precision agriculture.
News & Knowledge
- Blog
  Get an inside look at the industry.
- News
  Read the latest about us.
- Events
  Connect with us at industry events.
About Us
- Team
  Our team is what makes Rogue Valley Microdevices so special. Learn more about our leadership team.
- Contact Us
  Questions? Get in touch with us. We’re excited to hear from you.
- Join Our Team
  Apply for our open positions and play a key role in the expansion of an advanced microelectronics company.
- Living in Southern Oregon
  Learn about the area and discover all that southern Oregon has to offer.
Request a Quote
Shop
Sillicon Wafer

Metal Lift-Off

We’re experts in depositing thick metal layers. As a result, we offer a specialized bilayer resist process that improves film adhesion, resulting in clean, high-quality lift-off.

Request a Quote

Starting Substrates

We can process on several different types of starting materials, including the following. And if you don’t see your substrate below, please contact us. We may be able to accommodate you.

Diameter: 100mm, 150mm, 200mm
Silicon and SOI
Glass and Fused Silica
Sapphire

Metals for Lift-Off

We have developed lift-off processing for the following metals. Don’t hesitate to contact us if you have a different requirement.

Aluminum
Chrome
Copper
Gold
Indium

Nickel
Platinum
Tin
Titanium
Silver

Click to access the login or register cheese