MEMS Foundry Capabilities
Advanced Device Fabrication & MEMS Foundry Services for Innovation-Driven Product Development
At Rogue Valley Microdevices, we are a leading provider of precision MEMS manufacturing, advanced MEMS device fabrication, and high-performance sensor manufacturing solutions for innovators, engineers, and product developers worldwide. As a trusted U.S.-based MEMS foundry, we deliver reliable, scalable MEMS foundry services. These are tailored to the technical, commercial, and performance requirements of your device.
Our comprehensive MEMS Foundry Services support the full MEMS development lifecycle — from early-stage MEMS design enablement and process development to prototype fabrication, wafer processing, and high-volume MEMS production. In addition, with decades of MEMS process expertise, deep microfabrication knowledge, and a highly flexible manufacturing environment, we help customers accelerate MEMS development, reduce production risk, and transition efficiently from concept to commercial manufacturing.
Through our integrated MEMS manufacturing and sensor fabrication capabilities, clients gain a streamlined pathway to scalable MEMS production. This is backed by proven foundry infrastructure and disciplined process control.
Comprehensive MEMS Foundry Capabilities That Scale with Your Project
Our advanced MEMS foundry provides a broad portfolio of front-end wafer processing capabilities designed to support complex MEMS devices across multiple industries and applications. Whether you are developing a MEMS prototype, qualifying a new sensor platform, or preparing for high-volume production, our MEMS foundry services are engineered to scale with your technical and commercial requirements.
We support multiple wafer sizes and diverse MEMS device architectures through adaptable tool sets, configurable process modules, and repeatable manufacturing workflows. Our MEMS wafer processing capabilities include deposition, etch, lithography, and other critical microfabrication processes required for precision MEMS manufacturing.
By combining flexible MEMS process development with production-ready infrastructure, our MEMS foundry enables seamless scaling from low-volume pilot builds to full commercial MEMS manufacturing. This scalability, process flexibility, and manufacturing discipline are the foundation of our MEMS Foundry Services and are designed to evolve with your device roadmap, production targets, and global market demands.
Photolithography
Contact and Proximity Alignment for large features (5µm and greater). Stepper is available on 150mm substrate for features that need 2µm. Moreover, our foundry services enable advanced photolithography processes for custom applications. In addition, MMES Foundry Services provide tailored solutions for unique device requirements.
Resist Coating
Positive, negative, lift-off, and polyimide photoresist solutions to meet your requirements, including spin coat and spray coat. Our services include foundry expertise for high-quality resist coating at every stage of MEMS device manufacturing. Notably, MMES Foundry Services are trusted for their reliability in resist processes.
Metal Lift-Off
A solution for materials sensitive to etching. Our metal lift-off process is just one example of the customizable foundry services we offer. All of these are enabled by MMES Foundry Services for MEMS fabrication needs.
Etching
We offer a variety of etch types to meet your requirements, including DRIE, wet silicon etch, dry passivation etch, and wet etch metal and dielectric. Notably, our etching capabilities are part of the comprehensive suite of MEMS foundry services provided by Rogue Valley Microdevices. All etching operations are supported by MMES Foundry Services.