PECVD OXIDE DEPOSITION FILMS
Request a Quote ShopOur PECVD oxide is a single sided film that has been optimized for wafers requiring minimal thermal processing, and is often used during the semiconductor manufacturing process to form intra-metal dielectric stacks. PECVD oxide is also used in MEMS and surface micro-machining processes. Our PECVD oxide films offer you greater process flexibility and can be combined with many of our other films including PECVD nitride, LPCVD nitride, and PVD metals.
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