This product consists of medium resistivity Silicon wafers coated with 3um of our ultra-pure Wet Thermal Oxide. Thick thermal oxide is a common material used in the fabrication of Wave guide technologies and Silicon on Insulator wafers. All orders are sent with a Certificate of Conformance containing wafer specifications and film thickness data.
100mm Silicon Wafers 30,000A Wet Thermal Oxidation Parameters |
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Thickness | 28,500Å – 31,500Å |
Thickness Tolerance | 30,000Å +/-5% |
Sides Pressed | Both |
Refractive Index | 1.456 +/-0.02 @ 632.8nm |
Film Stress | -320MPa +/-50MPa (Compressive) |
Wafer Thickness | Std. Thickness |
Wafer Material | Silicon |
Temperature | 900C° – 1050C° |
Gasses | Oxygen |
Equipment | Horizontal Furnace |