100mm Silicon Wafers 30,000A Wet Thermal Oxide

$850.00

Substrate: Silicon Wafers
Diameter: 100mm
Type/Dopant: P/Boron
Orientation: <100>
Resistivity: 1-20 Ohm-cm
Thickness: 525 +/- 25um
Front Side: Polished
Back Side: Etched
Film: 30,000A +/- 5% Wet Thermal Oxide


Free Shipping in U.S 2nd day air for orders above $500.00
Buy now, get in 2 days

1 in stock (can be backordered)

Categories: ,

This product consists of medium resistivity Silicon wafers coated with 3um of our ultra-pure Wet thermal Oxide.  Thick thermal oxide is a common material used in the fabrication of Wave guide technologies and Silicon on Insulator wafers.  All orders are sent with a Certificate of Conformance containing wafer specifications and film thickness data.

  Wet Thermal Oxidation Parameters

Thickness28,500Å – 31,500Å
Thickness Tolerance30,000Å +/-5%
Sides PressedBoth
Refractive Index1.456 +/-0.02 @ 632.8nm
Film Stress-320MPa +/-50MPa (Compressive)
Wafer ThicknessStd. Thickness
Wafer MaterialSilicon
Temperature900C° – 1050C°
GassesOxygen
EquipmentHorizontal Furnace