We have designed our Wet Thermal Oxidation process to ensure that you receive the highest quality films. This product consists of medium resistivity Silicon wafers coated with 4um of our ultra-pure Wet thermal Oxide. All orders are sent with a Certificate of Conformance containing wafer specifications and Thermal Oxide film thickness data.
Wet Thermal Oxidation Parameters
|Thickness||3,8000Å – 42,000Å|
|Thickness Tolerance||40,000Å +/-5%|
|Refractive Index||1.456 +/-0.02 @ 632.8nm|
|Film Stress||-320MPa +/-50MPa (Compressive)|
|Wafer Thickness||Std. Thickness|
|Temperature||900C° – 1050C°|