150mm Silicon Wafers 20,000A Wet Thermal Oxide

$1,025.00

Product ID: PRD1508
Substrate: Silicon Wafers
Diameter: 150mm
Type/Dopant: P/Boron
Orientation: <100>
Resistivity: 1-20 Ohm-cm
Thickness: 675 +/- 25um
Front Side: Polished
Back Side: Etched
Film: 20,000A +/- 5% Wet Thermal Oxide


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SKU: PRD1508 Categories: ,

2um Thick Thermal Oxide on medium resistivity 150mm Silicon Wafers has long been considered a common starting material for a variety of MEMS and Sensor Devices.  Our ultra-pure Wet Thermal Oxidation process is designed to ensure that you receive the highest quality films. All orders are sent with a Certificate of Conformance containing wafer specifications and Thermal Oxide film thickness data.

150mm Silicon Wafers 20,000A Wet Thermal Oxide Parameters

Thickness 19,00Å – 21,000Å
Thickness Tolerance 20,000Å+/-5%
Sides Pressed Both
Refractive Index 1.456 +/-0.02 @ 632.8nm
Film Stress -320MPa +/-50MPa (Compressive)
Wafer Thickness Std. Thickness
Wafer Material Silicon
Temperature 900C° – 1050C°
Gasses Oxygen
Equipment Horizontal Furnace

Additional information

Diameter

Type/Dopant

Orientation

Resistivity

Surface

Film