100mm Silicon Wafers 5,000A Wet Thermal Oxide

$975.00

Substrate: Silicon Wafers
Diameter: 150mm
Type/Dopant: P/Boron
Orientation: <100>
Resistivity: 1 – 20 Ohm-cm
Thickness: 675 +/- 25um
Front Side: Polished
Back Side: Etched
Film: 5000A +/- 5% Wet Thermal Oxide


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2 in stock (can be backordered)

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5,000A of Thermal Oxide on medium resistivity 150mm silicon wafers has long been considered a common starting material for a variety of MEMS and Sensor Devices.  Our ultra-pure Wet Thermal Oxidation process is designed to ensure that you receive the highest quality films. All orders are sent with a Certificate of Conformance containing wafer specifications and Thermal Oxide film thickness data.

100mm Silicon Wafers 5,000A Wet Thermal Oxidation Parameters

Thickness4,750Å – 5,250Å
Thickness Tolerance5,000Å+/-5%
Sides PressedBoth
Refractive Index1.456 +/-0.02 @ 632.8nm
Film Stress-320MPa +/-50MPa (Compressive)
Wafer ThicknessStd. Thickness
Wafer MaterialSilicon
Temperature900C° – 1050C°
GassesOxygen
EquipmentHorizontal Furnace