Silicon Wafers 150mm 10,000A Wet Thermal Oxide

$975.00

Substrate: Silicon Wafers
Diameter: 150mm
Type/Dopant: P/Boron
Orientation: <100>
Resistivity: 1-20 Ohm-cm
Thickness: 675 +/- 25um
Front Side: Polished
Back Side: Etched
Film: 10,000A +/- 5% Wet Thermal Oxide


Free Shipping in U.S 2nd day air for orders above $500.00
Buy now, get in 2 days

2 in stock (can be backordered)

Categories: ,

This product consist of 150mm silicon wafers with 1um of Wet thermal Oxide. Thermal Oxide on medium resistivity silicon wafers has long been considered a common starting material for a variety of MEMS and Sensor Devices.  Our ultra-pure Wet Thermal Oxidation process is designed to ensure that you receive premium quality films that provide the consistency and repeatability needed make your project a success.  All orders are sent with a Certificate of Conformance containing wafer specifications and Thermal Oxide film thickness data.

Silicon Wafer 150mm 10,000A Wet Thermal Oxidation Parameters

Thickness9,500Å – 10,500Å
Thickness Tolerance10,000Å+/-5%
Sides PressedBoth
Refractive Index1.456 +/-0.02 @ 632.8nm
Film Stress-320MPa +/-50MPa (Compressive)
Wafer ThicknessStd. Thickness
Wafer MaterialSilicon
Temperature900C° – 1050C°
GassesOxygen
EquipmentHorizontal Furnace