This product consists of medium resistivity 150mm Silicon Wafers coated with 5um of our ultra-pure Wet Thermal Oxide. Thick thermal oxide is a common material used in the fabrication of Wave guide technologies and Silicon on Insulator wafers. All orders are sent with a Certificate of Conformance containing wafer specifications and film thickness data.
150mm Silicon Wafers 50,000A Wet Thermal Oxidation Parameters
|Thickness||47,500Å – 52,500Å|
|Thickness Tolerance||50,000Å +/-5%|
|Refractive Index||1.456 +/-0.02 @ 632.8nm|
|Film Stress||-320MPa +/-50MPa (Compressive)|
|Wafer Thickness||Std. Thickness|
|Temperature||900C° – 1050C°|