PRD1509 – 150mm Silicon Wafers 60,000A Wet Thermal Oxide

$3,329.75

Product ID: PRD1509
Substrate: Silicon Wafers
Diameter: 150mm
Type/Dopant: P/Boron
Orientation: <100>
Resistivity: 1-20 Ohm-cm
Thickness: 675 +/- 25um
Front Side: Polished
Back Side: Etched
Film: 60,000A +/-5% Wet Thermal Oxide


All Sales are Final.  RVM Terms and Conditions Apply
Shipping PP&A.  Lead time 1 week

Available on backorder

SKU: PRD1509 Categories: ,

Description

This product consists of medium resistivity 150mm Silicon wafers coated with 6um of our ultra-pure Wet Thermal Oxide.  Thick thermal oxide is a common material used in the fabrication of Wave guide technologies and Silicon on Insulator wafers.  All orders are sent with a Certificate of Conformance containing wafer specifications and film thickness data.

150mm Silicon Wafers 60,000A Wet Thermal Oxidation Parameters

Thickness 57,000Å – 63,000Å
Thickness Tolerance 60,000Å +/-5%
Sides Pressed Both
Refractive Index 1.456 +/-0.02 @ 632.8nm
Film Stress -320MPa +/-50MPa (Compressive)
Wafer Thickness Std. Thickness
Wafer Material Silicon
Temperature 900C° – 1050C°
Gasses Oxygen
Equipment Horizontal Furnace

Additional information

Diameter

Type/Dopant

Orientation

Resistivity

Surface

Film