60,000A Wet Thermal Oxide on 150mm Silicon Wafers (PRD1509)

$2,175.00

Substrate: Silicon Wafers
Diameter: 150mm
Type/Dopant: P/Boron
Orientation: <100>
Resistivity: 1-20 Ohm-cm
Thickness: 675 +/- 25um
Front Side: Polished
Back Side: Etched
Film: 60,000A +/-5% Wet Thermal Oxide


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This product consists of medium resistivity 150mm Silicon wafers coated with 6um of our ultra-pure Wet thermal Oxide.  Thick thermal oxide is a common material used in the fabrication of Wave guide technologies and Silicon on Insulator wafers.  All orders are sent with a Certificate of Conformance containing wafer specifications and film thickness data.

  Wet Thermal Oxidation Parameters

Thickness 57,000Å – 63,000Å
Thickness Tolerance 60,000Å +/-5%
Sides Pressed Both
Refractive Index 1.456 +/-0.02 @ 632.8nm
Film Stress -320MPa +/-50MPa (Compressive)
Wafer Thickness Std. Thickness
Wafer Material Silicon
Temperature 900C° – 1050C°
Gasses Oxygen
Equipment Horizontal Furnace