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Dry Chlorinated Thermal Oxide

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100mm Silicon Wafers 3,000A Dry Chlorinated Thermal Oxide & Forming Gas Anneal
$1,275.00

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Thermal Oxidation
LPCVD Nitride Deposition
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PECVD Oxide
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Sputtered Metal Deposition
Thermal Annealing
Photoresist Spray Coat
Silicon Wafers
Deep Reactive Ion Etch (DRIE)

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MEMS FOUNDRY
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541-774-1900
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